Published Manufacturing & Production Atmospheric ALD Coatings Atmospheric-pressure spatial ALD technology for depositing nanoscale metal-oxide coatings on substrates (wafers, glass, plastics, paper, fabrics) near room temperature. By Kevin Musselman
Published Electronics E-Beam Functionalized ALD Graphene (and other materials) is hydroxylated with water vapor dissociated by an electron beam. Thin films can then be grown locally through atomic layer deposition. By University of Missouri
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