Displacement MEMS Sensor

About

This technology involves a sensor to detect the displacements of the substrate to which the proof mass is attached and is carefully designed to detect the motions. Extensive preliminary work has been performed to validate the design, including: simplified analyses of the response of only the first mode of vibration; and consideration of only one degree of freedom and multiple degrees of freedom based on a variational formulation. The most critical portion of the sensor design is the structure that connects the proof mass to the surrounding substrate. The details of the design were determined through a rigorous optimization process. The design parameters used in the optimization include the dimensions of the support structure and the overall dimensions of the proof mass. The mass of the entire assembly is also a very important parameter, which was included in the optimization of the entire structure.  ADVANTAGES:  Provides better resolution (lower noise floor) and wider bandwidth than existing sensors for measuring vibrations than can be achieved with existing accelerometers  Durable and robust structure that behaves as needed in a controlled manner over the frequency range of interest  INTELLECTUAL PROPERTY:  Intellectual property position is currently under evaluation.