Microelectromechanical system (MEMS) switch that can recover from pull-in collapse using electrostatic levitation


A microelectromechanical system (MEMS) switch can recover from pull-in collapse using electrostatic levitation. The approach is of great utility for any MEMS component that has to recover easily from pull-in, which is usually irreversible and permanently destroys the device, as electrostatic levitation allows pulled-in structures to be released and reused even when the contact area is large. This technology has a promising application in MEMS switches because of its enhanced reliability and robustness.

Key Benefits

• Levitation switch will not fail and will last longer
• Side electrodes enable the lift-off force, which is not present in conventional switches.
• Unlike the sandwiched beam technique, this technique allows the device to become stable again after release.
• The levitation technique does not add another layer to the fabrication process and is not in the path of motion of the beam, and therefore it can be completely passive when not in use

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