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The sensors shows improved performance and reduced cost. Also, it reduces cross-talk and coupling across the x, y and z axes.
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Summary This invention extends the capabilities of the pop-up fabrication IP portfolio by implementing a multi-axis force sensor capability. Sensors of this type are pervasive for measuring forces in the x, y and z plane. By integrating this capability into pop-up fabrication, it greatly enhances the utility of this manufacturing method. The range of applications is greatly expanded to include biomedical, micro-robotic, optical and other applications. Advantages of this sensor compared to conventional multi-axis force sensors are improved performance and reduced cost. In particular, it dramatically reduces cross-talk and coupling across the x, y and z axes. Intellectual Property Status Patent(s) Pending Reference Harvard Case# 5162 Categories Electronics/Semiconductors Materials Science/Interface Science Medical Devices Robotics/Wearable Electronics Sensors/Imaging