This novel invention provides lower signal loss and higher quality factor in comparison to current micro/nano-mechanical acoustic devices.

About

Background: Phononic crystal wave structures, developed by Georgia Institute of Technology researchers, provide low signal loss and high quality factor in comparison to current micro/nano-mechanical acoustic devices. This device addresses the need for improved micro/nano-mechanical acoustic devices and associated manufacturing methods capable of providing high quality devices. An acoustic structure can generally comprise a phononic crystal slab configured as a micro/nano-acoustic wave medium. The phononic crystal slab can define an exterior surface that bounds an interior volume, and the phononic crystal slab can be sized and shaped to contain acoustic waves within the interior volume of the phononic crystal slab; wherein a portion of the phononic crystal slab comprises a periodic array of empty inclusions creating a phononic band gap. The phononic crystal slab can comprise at least one defect portion. The defect portion can affect periodicity characteristics of the phononic crystal slab. The defect portion can be shaped and arranged to enable confinement and manipulation of acoustic waves through the defect portion(s) of phononic crystal slab. Phononic crystal wave structure can be configured for use in a wide variety of applications, including, but not limited to sensors and electronic devices for radio frequencies (RF) such as resonators, multiplexers, de-multiplexers, filters, frequency reference devices, oscillators, delay lines, phase shifters, and couplers. Numerous of these applications can also be used for wired and wireless communication systems and sensing systems.  

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